Abstract
Surface imaging in a transmission electron microscope by diffraction contrast is compared with imaging by focus-dependent phase contrast. With both techniques surface steps of atomic height can be imaged with high resolution. At high magnification, kinks along the atomic steps become visible. Advantages and disadvantages of both methods are discussed. By combining the two methods, the initial stage of etching on the surface due to the interaction of a surface layer with the electron beam could be observed. The final etch structure shows a dynamic behavior which indicates that the number of etch pits is approximately constant but their position changes during the observation.
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