Abstract
Non-specular x-ray reflectivity under grazing incidence is sensitive to the morphology of buried interfaces in multilayers. Using this method we have studied one-dimensional self-assembled patterns (ripples) occurring in Ge/Si superlattices. On the basis of a model of a self-affine sequence of ripples with superimposed fractal roughness, we have determined the structural parameters of the ripples from specular and non-specular x-ray reflection. The azimuthal miscut direction was close to [010], the ripples were not perpendicularly oriented to the miscut but almost parallel to it. The parameters and orientation of the ripples are explained by a zigzag structure of the atomic steps formed on the surface due to its 2 × 1 reconstruction.
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