Abstract

A closed-form solution is obtained for the angular distribution of intensity in diffraction from a surface on which the terrace size distribution is given by the geometric distribution, i.e. a surface in which the occurrence of steps is random. Several distributions of step heights that are integral multiples of the monatomic step height are considered. It is shown that a random occurrence of monatomic steps will cause some multiatomic steps. If a very broad distribution of step heights is assumed, the beam width no longer oscillates with energy but approaches a constant value except at the characteristic energies of zero width. Comparisons are made with a previous model and with measurements on GaAs(110).

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