Abstract
The dielectric properties of SrTiO 3 (STO) thin films deposited on LaAlO 3 (LAO) substrates with various perovskite conducting layer including YBa 2Cu 3O 7 (YBCO), SmBa 2Cu 3O 7 (SmBCO), GdBa 2Cu 3O 7 (GBCO) and SrRuO 3 (SRO) as bottom electrode in a parallel-plate capacitor configuration were evaluated. The lattice mismatch between STO and different electrode materials varies markedly, but the dielectric constants of the STO films were not much different for different bottom electrodes. However, lower dielectric loss was observed in STO films on SRO electrodes. Under the optimum deposition conditions the tunability was large and the loss tangent was in the range of 0.001–0.01 at 1 kHz and zero bias field.
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