Dielectric Breakdown-Based Microsensor for On-Chip Ambient Pressure Monitoring

Abstract

The continuous monitoring of ambient pressure requires fast and stable device response. In this paper, we report the development of controllable, spatially steady, and sustained dielectric breakdown (DB) assisted ionization (DBAI)-based microdevice, suitable for continuous pressure monitoring. This steady output in DBAI process is attributed to the: 1) generation of stable E in the effective interelectrode gap $d_{\text {int}}^{\prime }$ under biased state; 2) electron avalanche free ionization at the microtips; and 3) collisionless transport of charges between the electrodes. The narrow $d_{\text {int}}^{\prime }$ and flat basal surface of the microtip facilitate the development of stable E in the interelectrode space, which leads to consistent and spatially sustained DBAI process. The absence of electron avalanche provides controllability to the ionization process and helps in significant reduction of hysteresis. The collisionless transport of electrons in the dynamic range allows enhanced electrical stability and fast device performance. The device is highly miniaturized and energy efficient, which makes it suitable for on-chip applications.