Diamond‐like‐carbon LC‐alignment layers for application in LCOS microdisplays

Abstract

Abstract— To improve the lifetime and yield of LCOS microdisplays, non‐contact LC alignment techniques using inorganic materials are under investigation. This report focuses on oblique ion‐beam treatment of diamond‐like carbon (DLC) layers, and in particular on the influence of the ion dose on the LC alignment on DLC, keeping the ion‐beam angle (40°) and ion‐beam energy (170 eV) the same. LC alignment on ion‐milled DLC layers is uniform if the ion dose is between 3.8 × 10−4 C/cm2 and 5.5 × 10−3 C/cm2. Above and below this ion dose range, non‐uniform alignment is observed. NEXAFS experiments show that this is caused by lack of molecular anisotropy on the surface of the ion‐milled DLC layers. By varying the ion dose between 3.8 × 10−4 C/cm2 and 5.5 × 10−3 C/cm2, LC molecules have an average pre‐tilt between 3° and 5°, which is within the desired range for application in LCOS microdisplays. The lifetime of the LCOS microdisplays with ion‐milled DLC for projection‐TV application is, however, shorter than the lifetime of microdisplays with PI layers. Ion milling probably creates a reactive surface that is unstable under the high light fluxes used in projection TVs. A solution for this problem could be chemical passivation of the ion‐milled alignment layers. Initial experiments with passivation of ion‐milled PI resulted in an increase in lifetime, but the lifetime after passivation was still lower than the lifetime of rubbed PI layers (factor 0.7). Nevertheless, ion‐milling of DLC or PI can be a good alternative LC alignment technique in other LCD applications. LC‐alignment layers based on inorganic layers such as obliquely deposited SiO2 films would be a better option for application in LCOS microdisplays due to their higher light stability.