Abstract

Diamond films have been grown on polished Si substrates seeded withnanocrystalline diamond powder colloid using hot-filament chemical vapourdeposition. Instead of using the conventional gaseous carbon source, a carbonizedW filament was used as the carbon source. The only feeding gas was hydrogen.Compared with those produced by traditional methods, the polycrystallinediamond grown by this new method has smaller grain size. The growthmechanism is also discussed.

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