Abstract
Chemical vapor deposited diamond/carbon micro- and nanostructures are excellent field emission cathodes for novel applications in sensors, MEMS, and NEMS because of their low electron affinity and excellent mechanical and chemical properties. However, practical micropatterning and fabrication of emitter structures are needed to fully exploit their potential use. This paper describes the use of microfabrication methods to achieve various forms of morphologically-engineered cathodes such as micro pyramidal tips with self-aligned gated membrane, nano-diamond lateral field emitters with built-in anode, and carbon-nanotube field emission arrays with self-aligned gate. We report the achievement of these micropatterned diamond/carbon field emission-based sensing platforms with excellent field emission characteristics. These field emitter-based microstructures are efficient sensing platforms from which novel sensors and MEMS can be derived.
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