Abstract
In this paper, we proposed a 3D MEMS nozzle using deep reactive ion etching (DRIE) to improve the performance of MEMS thruster. The design, fabrication, and performance evaluation of the proposed nozzle were presented. Prior to fabrication, CFD analyses were performed to predict the performance enhancement of the tapered nozzle compared with the hole-type nozzle. Flow characteristics were studied under ambient condition at an operating pressure of 10 bar. The DRIE technology for fabricating the hole nozzle was established, and hole nozzles with a throat diameter of 50–350 μm was fabricated. Thrust was measured through the use of quartz force sensor based on piezo-resistive sensor. We compared experimental results with CFD analysis result at various operating pressure. From the experimental results, CFD and experimental results showed about 10% thrust difference.
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