Abstract
In processes using the ultrashort pulsed laser, the phenomenon that the ablation efficiency is reduced due to the increase of the shielding effect of the generated plume is increasingly caused by the use of the high power and high repetition rate. A new method is needed to prevent a decrease in ablation efficiency in processing using an ultrashort pulsed laser. In this study, the proposed a processing method that can improve the ablation efficiency by providing an efficient escape path of plume, and examine the feasibility of a new processing method. The new method we proposed is a method of laser processing after generating a fine curvature in the polymer as a preliminary preparation. The fine curvature of the polymer produced by the preliminary preparation induces an artificial chimney-like opening along the path of the incident beam during laser processing, thereby enabling the plume to be effectively removed. The experiment for examine the feasibility through a new method was conducted using a 10-picosecond laser of UV wavelength with two optical systems. As a new processing method, when processing with ultrashort pulse laser, it was observed that the ablation efficiency improved.
Highlights
Flexible devices, such as flexible displays [1,2,3] and batteries [4,5,6], are drawing attention.For flexible devices, flexible materials such as polymers are used instead of conventional hard materials such as glasses
To lower the reduction of ablation efficiency—caused by shielding effect caused by plumes generated when processing with ultrashort pulse laser of high output and high repetition rate—we propose a method of improving ablation efficiency by inducing an efficient escape route of plumes generated by laser such as increasing the welding efficiency by key hole opening, which is often used in laser welding
We processed the samples using a fine curvature through a preliminary preparation in an objective lens-based optical system that is used for micro precision laser processing, we used the conventional laser ablation method and compared the results
Summary
Flexible materials such as polymers are used instead of conventional hard materials such as glasses. The requirements of each application should be satisfied in order to utilize flexible polymers in the applications of flexible devices. Active research on laser ablation methods is being conducted as a solution for precision machining that is appropriate these requirements [7,8,9]. The first polymer processing using laser was performed in 1982 by Srinvasan et al [10] and Kawamura et al [11]. Many researchers have conducted studies on laser processing using various polymers used in a variety of applications. Ultraviolet (UV) laser is used for laser processing of polymer materials because it can process materials by linear absorption. UV laser is characterized by much larger photon energy than that of the laser of infrared wavelength range
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