Abstract
This paper describes the development of an active isolation mat for cancelation of vibrations on sensitive devices with a mass of up to 500 gram. Vertical disturbing vibrations are attenuated actively while horizontal vibrations are damped passively. The dimensions of the investigated mat are 140 × 140 × 20 mm. The mat contains 5 dielectric elastomer stack actuators (DESA). The design and the optimization of active isolation mat are realized by ANSYS FEM software. The best performance shows a DESA with air cushion mounted on its circumference. Within the mounting encased air increases static and reduces dynamic stiffness. Experimental results show that vibrations with amplitudes up to 200 μm can be actively eliminated.
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