Abstract
In order to develop a pH sensor having a wide pH response range from strong acid to strong alkali, electrolyte-insulator-semiconductor capacitors using corrosion-resistant and double-oxide films as the insulator were fabricated and their response characteristics to and alkali metal ions were examined. The sensors with and films having an cationic fraction of about 0.4 showed a wide linear pH response range of −1.5 to 13.0 and a small alkali metal ion sensitivity. The use of the film is suitable for increasing pH sensitivity and that of the film is promising for increasing corrosion resistance against strong alkali solutions. © 2004 The Electrochemical Society. All rights reserved.
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