Abstract
Abbe error is the inherent systematic error in all numerically controlled (NC) machine tools. Any angular error of the moving stage will result in the position offset of the ideal cutting point. The existing method using error budget obtained from prior calibration can only compensate for the mean positioning errors, which are not temperature dependent. In this paper, the development of a small three-axis angular sensor is developed. It uses DVD pickup head technology. The pitch and yaw angles are detected based on the autocollimation principle while the roll angle is detected using the pendulum principle. Three angular sensors are integrated into one single module unit so that it can be installed in the proper location of the moving stage. Using kinematic analysis, the Abbe error can be significantly compensated for in real time.
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