Abstract
A scanning minority-carrier transient spectroscopy with optical injection and full transient analysis is developed. The continuity equation is solved with adequate injection and boundary conditions in order to determine the optimum experimental conditions and the corresponding optimum spatial resolution. A numerical treatment is implemented which filters out the noise component of the transient, improving the sensitivity of the technique. It allows us to make a fit to the transient, to check its exponential character and to treat certain cases of nonexponential behavior. The technique is applied first to a step distribution of laser-induced defects and results can be obtained which are in good agreement with theoretical predictions. Finally, the gettering of gold to dislocations during a rapid thermal annealing is illustrated using this technique.
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