Abstract

The wire running system of the tabletop Wire-EDM machine for making intricate micro parts developed in our previous study is improved in the paper. A very simple but novel micro-wire cutting mechanism that allows the use of the thin wire of a diameter as small as 20μm is designed. The vibration of the micro wire is suppressed by implementing a unique tension control principle and vibration absorbers. In actual machining the workpiece is mounted on the spindle having indexing ability. By proper planning the wire moving path, micro gear, micro turbine, micro screw, etc. can be manufactured. In the paper the micro bevel gear, which has special appearance and is very difficult if not impossible to be machined by other micro fabrication technologies, is also manufactured satisfactorily.

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