Abstract

Ion beam induced fluorescence microscopy is a new imaging technique which has the potential to achieve sub-50nm spatial resolution fluorescence images. Currently the resolution of the technique has been limited to around 150nm mainly because of inefficient collection and detection of emitted photons from the sample. To overcome this limitation, a new light collection system based on a custom made parabolic mirror is employed to enhance the fluorescence collection. The custom made mirror is designed so as to obtain both structural (scanning transmission ion microscopy) and ion beam induced fluorescence imaging simultaneously. The design and characterization of the parabolic mirror is discussed in detail.

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