Abstract
A dual-stator piezoelectric motor that can work in resonant and quasi-static states is proposed in this study to achieve high speed and high resolution cross-scale output. Two piezoelectric stators with a frequency of 1:2 and a vibration amplitude ratio of 2:1 are used for driving the sliding table with multipoint friction coupling to produce asymmetric sawtooth wave vibration. Then, they are used with the inertia force of the sliding table to achieve stepping motion. A dual-stator piezoelectric motor prototype is designed, and modal analysis is conducted using ANSYS software to obtain the resonant frequencies of the longitudinal vibration modes of the two stators. The dynamic model is established, and the numerical analysis is performed to obtain the trajectory and output characteristics of the sliding table. Finally, the prototype of the piezoelectric motor is constructed. Experimental results show that the minimum speed of the piezoelectric motor is 0.013 mm/s, the resolution is 0.5 μm, the maximum speed is 11.14 mm/s, and the maximum load is 40 g.
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