Abstract
A new planar micro electrothermal actuator capable of bidirectional rotation is presented. The ring thermal actuator has a wheel-like geometry with eight arms connecting an outer ring to a central hub. Thermal expansion of the arms results in a rotation of the outer ring about its center. An analytical model is developed for the electrothermal and thermal–mechanical aspects of the actuator's operation. Finite element analysis is used to validate the analytic study. The actuator has been fabricated using the multi-user MEMS process and experimental displacement results are compared with model predictions. Experiments show a possible displacement of 7.4 µm in each direction. Also, by switching the current between the arms it is possible to achieve an oscillating motion.
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