Abstract
ZnO nanostructures were synthesized on porous Si (PSi) substrates using the thermal catalytic-free immersion method. Crack-like ZnO nanostructures were formed on the bare, sponge-like PSi structures. An approach to fabricate chemical sensors based on the ZnO/PSi nanostructure arrays that uses an electrochemical impedance technique is reported. Sensor performance was evaluated for ethanol solutions by the morphology and defect structures of the ZnO nanostructure layer. Results indicate that the ZnO/PSi nanostructure chemical sensor exhibits rapid and high response to ethanol compared with a PSi nanostructure sensor because of its small particle size and an oxide layer acting as a capacitive layer on the PSi nanostructure surface.
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