Determination of lead concentration and film thickness in electroluminescent calcium sulfide thin films by X-ray fluorescence

Abstract

For the analysis of electroluminescent thin films, X-ray fluorescence (XRF) provides a convenient method as both the concentration of the dopant and the film thickness can be determined rapidly and non-destructively. An XRF method for the determination of thickness and lead concentration in lead doped calcium sulfide thin films was developed. Calibration standards made of polyvinyl alcohol and gelatin as well as filter paper standards were used. In addition, the applicability of a fundamental parameter program UniQuant was investigated. For comparison, the concentrations of lead and calcium were determined after dissolution by atomic absorption spectrometry. Generally, the correlation between the different methods excluding the use of filter paper standards was satisfactory. When the dopant concentration was very low or very high, however, the fundamental parameter program yielded best results. Determination of thicknesses by XRF was made by comparing the sulfur K α intensities of the sample and those of a zinc sulfide standard. A correction factor for molar masses and densities was applied. The thicknesses obtained were compared to those measured with a profilometer after etching and the deviations were found to be less than 10%.