Determination of Elastic Constants by Line-Focus V(Z) Measurements of Multiple Saw Modes

Abstract

Line focus acoustic microscopy (LFAM) provides a method to determine the elastic constants of homogeneous materials and thin-film/substrate configurations, see Refs. [1–5]. The elastic constants are determined from the velocities of surface acoustic waves, which are obtained from measurement of the V(z) curve. Generally more than one elastic constant has to be determined. It is interesting to note that the procurement of sufficient data is sometimes more complicated for isotropic materials. For anisotropic solids the velocity can be measured as a function of the angle defining the propagation direction in the surface to yield a sufficiently large data set. For thin-film/substrate configurations measurements at various frequencies or for different film thickness may be carried out to obtain sufficient data. There are, however, obvious advantages to work with a single specimen and at a single frequency. This can be done by considering the contributions of more than one leaky SAW mode to the V(z) curve.