Abstract

Atomic hydrogen densities and their detection limit were determined accurately by vacuum ultraviolet laser fluorescence spectroscopy, tuned to the Lyman alpha line, using the third harmonic generation of a tunable dye laser pumped by a XeCl excimer laser as the excitation source. A well-characterized atomic hydrogen source, whose absolute density was measured by absorption, was used to assess the detection capability of the laser fluorescence spectroscopy, which gave absolute density determinations to within ±30% and a detection limit of 3×1015 m-3.

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