Abstract

A simple argon hollow cathode (HC) was investigated as a plasma source and a sputtering source for titanium. The HC consists of a Ti cylinder. There are two different modes of operation: a low-current discharge with the typical pink bluish argon glow and the high-current HC discharge mode. In the latter case, an intensive glow was observed at the upper end of the Ti cathode. Under certain conditions, this glow was observed to float freely between cathode and anode ring.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.