Abstract
High-speed precision positioning is highly demanded in electronic manufacturing, and the mechanical friction is the key factor affecting positioning accuracy. Currently, sub-micron positioning can only be achieved by using high-cost frictionless guiding system. A new parallel driven macro-micro compounded positioning stage design, which eliminates the saturation problem of micro actuator, is proposed by combining the long-stroke direct-driven stage and frictionless guiding mechanism based on flexure hinge. Two sets of driving and measuring systems are included in the macro-micro motion stage in order to control the macro and micro stages connected by flexure hinge separately. The high-speed and long-stroke movement is achieved by the rigid mechanical connection system of macro stage, and the flexible connection system of micro stage based on flexure hinge is used to quickly compensate the positioning error of macro stage. The above rigid-flexible motion scheme enables the long-stroke, high-speed and high-precision positioning. A new motion profile planning method based on the dynamic response optimization is also proposed to reduce the residual vibration of motion stage. Due to the faster response and lower tracking error performance of micro stage compared to the macro one, the macro/micro driving force is superimposed to realize the fast motion during the high-acceleration motion period and the micro-actuator can generate the inverse force to quickly compensate the motion error of macro stage during the constant-speed and low-speed positioning motion periods. Experimental results verified that the proposed macro-micro compounded stage design can effectively reduce the complexity of the control system through the innovation of the mechanism and realize high-precision and rapid positioning. It provides a new way for the design of sub-micron high speed positioning stage for micro-photoelectron manufacturing equipment.
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