Abstract
Laser beams can fluctuate in four directions, which requires active compensation by a fast steering mirror (FSM) motion system. This paper deals with the design of four-degrees-of-freedom (DoF) compliant parallel manipulators, for responding to the requirements of the FSM. In order to simplify high-precision control in parallel manipulators, maximum kinematic decoupling is always desired. A constraint map method is used to propose the four required DoF with the consideration of maximum kinematic decoupling. A specific compliant mechanism is presented based on the constraint map, and its kinematics is estimated analytically. Finite element analysis demonstrates the desired qualitative motion and provides some initial quantitative analysis. A normalization-based compliance matrix is finally derived to verify and demonstrate the mobility of the system clearly. In a case study, the results of normalization-based compliance matrix modelling show that the diagonal entries corresponding to the four DoF directions are about 10 times larger than those corresponding to the two-constraint directions, validating the desired mobility.
Highlights
Laser light sources have been widely used in various domains [1,2,3], with particular applications in high-quality and high-value products
The fast steering mirror (FSM) consists of a mirror, an actuator, and a flexure structure which is required to compensate for the two in-plane translations and two out-of-plane rotations related to the fluctuations of laser beams, i.e., four degrees of freedom (DoF) [12,13]
In [14], an FSM compensation system with double Porro prisms was reported to address the issues of the traditional FSM
Summary
Laser light sources have been widely used in various domains [1,2,3], with particular applications in high-quality and high-value products. Studies have shown that the geometric fluctuations of the laser light beam are affected by environmental conditions and by the input and its structure, and by thermal issues [4,5,6,7,8,9]. An optical device called a fast steering mirror (FSM) was invented to steer the laser beam, for stabilization and other applications [10,11]. The FSM consists of a mirror, an actuator, and a flexure structure which is required to compensate for the two in-plane translations and two out-of-plane rotations related to the fluctuations of laser beams, i.e., four degrees of freedom (DoF) [12,13]. In [14], an FSM compensation system with double Porro prisms was reported to address the issues of the traditional FSM. The 90◦ prism can tilt and shift the laser path when it is rotated and shifted
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