Abstract
The core component of profilometer is a stylus displacement measuring system, whose resolution reaches nanoscale. Since the stylus tip is very small, a variation on probing force has a great impact on the results of high-precision displacement measurements. In this paper, a special flat rectangular voice coil motor is designed to realize a constant probing force for the stylus displacement measuring system. Experimental results show the probing force can be adjusted from 5mg to 1000mg and the resolution can reach 5mg.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
