Abstract
Robot supported minimally invasive interventions are state of the art in operating theatres. To increase the accuracy of surgical instrument positioning, high-precision motion tracking systems are required. The miniaturization of microelectromechanical systems (MEMS) facilitates the placing of orientation detection sensors close to the mounting of the surgical instrument to enhance positioning accuracy. A high resolution inclination sensor was developed using the innovative approach of laser-micro-welding. Trench sizes down to 800 nm are fabricated with more than 6-fold increase in aspect ratios (structure depth to electrode gap) compared to sensors without gap reduction. Electrical and physical tests as well as finite-element-simulations were performed. An increased sensitivity from 7.2 fF/° up to 60 fF/° was verified for the sensor with reduced electrode gap and a customized ASIC.
Highlights
In the past few years surgical robots firmly established to support surgeons in minimally invasive interventions
The sensor is fabricated by using silicon high aspect ratio micromachining (HARM) technology to achieve 50 μm thick structures with about 4.5 μm trench size [4]
Aluminium is sputtered and patterned as interconnection layer (b) Afterwards the silicon microstructures were etched via a silicon dioxide mask in a STS Multiplex ICP System by deep reactive ion etching (DRIE) (c)
Summary
In the past few years surgical robots firmly established to support surgeons in minimally invasive interventions. The physical presence of high specialized surgeons in the operating theatre is technically no longer necessary since 2002 This was demonstrated by New York surgeons who realized a remote robot-assisted laparoscopic removal of the gallbladder of a patient in Strasbourg with the ZEUS System (Computer Motion, Galeta, CA) [1]. Fields of application beside the biopsy and resection of tumours are the locally limited high-dose irradiation, brain and abdominal surgery as well as cardiac surgery, in summary all precise navigation tasks Major advantages of these systems are the possibility to scale down the hand movement of the surgeon to high-accuracy fine pitched motions of the surgical instruments, the precise locking mechanism and tremor cancellation of the surgeon’s steering movements [3]. Unintentional injury of healthy tissue, blood vessels or nerves can be prevented
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