Design, fabrication and characterization of high performance SOI MEMS piezoresistive accelerometers

Abstract

Piezoresistive accelerometers have served as the frontrunners in micromachined accelerometer technology and have undergone modifications with the primary focus on device complexity and novel processes to circumvent performance trade-offs. This work comprises the analysis, design and development of micromachined SOI MEMS-based piezoresistive accelerometers for inertial sensing applications using minimalistic component design and a custom fabrication process to realize robust devices capable of withstanding more than ~106 cycles of error-free operation. Extensive simulation studies have been carried out to validate and tune the design parameters of the analytical models used. The devices have been subjected to an exhaustive range of static and dynamic tests to characterize their response which has been sensitive and highly linear with low noise, an intrinsic quality of piezoresistive sensors coupled with precision design and fabrication.