Abstract
Because of the high specific stiffness, the excellent thermal conductivity and thermal stability, silicon carbide (SiC) material is widely used as the material of optical reflecting mirror. The hardness of SiC is 22.2±2.2 GPa. It is difficult to be machined. A new robot flexible-belt grinding system was developed. It consists of a robot grinding system, a stress monitoring system and a clamping platform. The robot has a 6-axis manipulator. The robotic arm maximum travel range is more than 3m. Several grinding experiments were carried out, and the optimum grinding parameters for SiC were obtained. The line speed of flexible-belt is 10m/s, the feeding speed of the robot is 5mm/s. A Φ1.55m SiC mirror was grinded, and the entire processing cycle is 40 days. The processing efficiency is increased by 90%. After the polishing and coating process, the mirror surface was measured by a interferometer. The surface root mean square(RMS) is 0.0157 λ(λ=632.8nm).
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