Abstract
Abstract Ultrasound is widely used for nondestructive evaluation, structural health monitoring, acoustic emission, sound navigation ranging, and in sensors for automobiles, medicine, and many other applications. Next-generation, small-form-factor sensors have been achieved through advances in piezoelectric micromachined ultrasonic transducers (PMUTs) that can be positioned on either a flexible polymer or a silicon substrate to form an array. This article describes a materials and design optimization study that used finite element analyses to improve designs for robust and practical PMUT sensor arrays.
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