Abstract
The surface texture of polishing pad is a key factor which determines the performance of polishing pad, and by altering the geometrical pattern of polishing pad surface, the surface texture of polished workpiece can be improved. In this paper, based on phyllotaxis theory in biology, the polishing pad with phyllotactic pattern has been designed and the effects of phyllotactic parameters on the surface texture of polishing pad have been discussed. Lastly, the polishing pads with phyllotactic pattern have been made with lithography and composite plating technology, and the influence of correlative plating parameters on plated coating have been investigated. The results indicated that the abrasive grain block density increase with the increasing of the diameter D of abrasive grain block and the decreasing of phyllotactic coefficient k, and the quality of electroplating is optimal when current density is 1A/dm2 and temperature is 30°C.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
