Abstract
In order to realize the measurement of airflow velocity in narrow spaces, we fabricate, package and characterize a flexible and surface mount piezoelectric artificial cilia (PAC) for airflow sensing in a piezoelectric mobile robot (PMR). The diameter and height of the cilia are 0.3 mm and 5 mm, respectively, whose sensitivity is 30 (mV)/(m/s). Meanwhile, the PMR is 32.8 g in mass and 55 mm × 50 mm × 20 mm in size and it is capable of achieving a velocity of 200 mm/s. This sensing robot has advantages of light weight, miniature size, and low cost, which has potential to effectively evaluate air leakage in the pipeline.
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