Abstract
The design considerations and the fabrication process of a single chip capacitive sensor array suitable for chemical and DNA sensing are presented. Each sensor in the array consists of an ultra thin silicon membrane to be covered with receptor DNA. Upon exertion of surface stress, the membrane deflects resulting in a change in device capacitance. Finite element analysis (FEA) was applied to evaluate and optimize the response of the sensor. First experimental results on chemical substances are reported.
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