Abstract
A linear piezoelectric actuator based on the stick-slip principle is presented and tested in this paper. With the help of changeable vertical preload force flexure hinge, the designed linear actuator can achieve both large travel stick-slip motion and high-resolution stepping displacement. The developed actuator mainly consists of a bridge-type flexure hinge mechanism, a compound parallelogram flexure hinge mechanism, and two piezoelectric stacks. The mechanical structure and motion principle of the linear actuator were illustrated, and the finite element method (FEM) is adopted. An optimal parametric study of the flexure hinge is performed by a finite element analysis-based response surface methodology. In order to investigate the actuator’s working performance, a prototype was manufactured and a series of experiments were carried out. The results indicate that the maximum motion speed is about 3.27 mm/s and the minimum stepping displacement is 0.29 μm. Finally, a vibration test was carried out to obtain the first natural frequency of the actuator, and an in situ observation was conducted to investigate actuator’s stick-slip working condition. The experimental results confirm the feasibility of the proposed actuator, and the motion speed and displacement are both improved compared with the traditional stick-slip motion actuator.
Highlights
With the rapidly-growing demand for high accuracy in micro-nano fabrication and optical systems, designing high-accuracy nanopositioning systems has become more and more significant
Piezoelectric actuators can be mainly divided into ultrasonic actuators, direct driving actuators, inchworm actuators, stick-slip actuators and so on
Inspired by the above studies and the need for advanced stick-slip actuators, this paper proposes an actuator that can achieve both stable large-stroke and high-resolution linear motion, and the normal force between the stator and mover can be effectively adjusted with the help of adjusting an adjustable stage
Summary
With the rapidly-growing demand for high accuracy in micro-nano fabrication and optical systems, designing high-accuracy nanopositioning systems has become more and more significant. Two kinds of working modes of this designed actuator are presented to realize different functions When the piezo-stack that nested in the bridge-type flexure hinge mechanism works alone, the parasitic motion of the bridge-type flexure hinge mechanism enables the slider mover to achieve high-resolution fine motion, which can be applied in precise compensation for the position error. On the other hand, when two piezo-stacks that are nested in different flexure hinge mechanisms work together, the slider mover will achieve large stepping displacement motion due to the action of the compound parallelogram flexure hinge. This working mode can be brought into the adjustment of coarse positioning. The proposed actuator may have some significance for designing stick-slip actuators and potential applications for a high-precision micro/nano-system
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