Abstract
Multifrequency atomic force microscopy involves excitation of the cantilever probe and measurement of its response at multiple frequencies. This enables performing simultaneous material characterization and topography estimation. This paper reports the design, fabrication and evaluation of micro-cantilever probes with specified flexural eigen-frequencies. These frequencies are chosen to enhance the sensitivity to tip-sample forces in multifrequency atomic force microscopy. The probe's design involves choosing a suitable nominal geometry, development of a lumped parameter model for its flexural dynamics and iteratively tuning the dimensions so that the targeted eigen-frequencies are obtained. Using this approach, a cantilever probe having flexural eigen-frequencies in the ratio 1:2 is designed. A prototype of the designed probe has been fabricated and evaluated. The experimentally evaluated eigen-frequencies match the target frequencies by 99.7%.
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