Abstract
This paper describes the design and development of a clip building block system for Micro Electro-Mechanical Systems (MEMS). The system should allow MEMS applications to be constructed easily and fast, and that would require ideas for clippers, movable parts and connectors. Examinations on macro-scale design system were used to evaluate the different parts of the design. As a second step, a mask layout was created containing the different parts of the design which were analyzed and processed. Etching of the silicon building blocks followed by the mask layout was done at the clean-room. The assembling of the parts in an optical pathway showed that the requirements were realized and that the design can be used in its applications.
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