Abstract
Vacuum Chambers are used to achieve Ultra High Vacuum Pressures (10-7 to 10-16 Torr.) for the processes like Plasma Generation, X-ray Photoelectron Spectroscopy, Surface analysis etc. The reason behind the application of UHV pressures in above fields is to enable readily clean and contamination free surfaces during the experiment. These vacuum chambers are constructed by materials like Aluminum, Glass, Brass, Inconel, Monel Metal and Stainless Steels. Among all, Austenitic Stainless Steel (ASST 304 L) are the most reliable choice for high and ultra-high vacuum Systems because they are cost effective, corrosion resistant, effectively outgassed, good machinability and weldability. Therefore, vacuum chambers of ASST 304 L for use in lower 10-9-10-10 Pa region are often pretreated by baking in order to decrease the hydrogen outgassing, which is the main residual gas in that pressure range. The material for the construction of ultra-high vacuum chambers has to process at different time for different temperatures. Baking in ambient air is easy and cost effective. Therefore, design and analyze of the experimental setup to investigate the hydrogen ppm in different sample, can be carried out for different bake out.
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