Abstract
In recent years, Fast Tool Servo (FTS) mechanism in precision manufacturing equipment emerges as a promising application for the piezo-actuated flexible nanopositioner. A flexible nanopositioner with large stroke, high bandwidth, high precision and multi-Degrees-of-Freedom (multi-DOFs) is really desired for this application. In order to meet this requirement, a novel 2-DOF flexible nanopositioner consists of two pairs of differential lever displacement amplifiers (DLDA) is proposed in this paper first, also, kinetostatics modeling is conducted by using the Pseudo-Rigid Body (PRB) method. After a series of mechanism optimal designs, the performance of the designed nanopositioner is verified by using the Finite Element Analysis (FEA) method. A piezoelectric (PZT) actuator with 90 µm is selected in this simulation, the experimental results indicate that the mechanism workspace can achieve around 2.1×2.1 mm2, the bandwidth can reach up to around 136 Hz, while the cross-coupling is also kept with 1%. All the results consistently prove the proposed device possesses satisfactory performance for fulfilling the practical precision manufacturing tasks.
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