Abstract
A novel design of a MEMS torsional resonant magnetometer based on Lorentz force is presented and fabricated. The magnetometer consists of a silicon resonator, torsional beam, excitation coil, capacitance plates and glass substrate. Working in a resonant condition, the sensor’s vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the air damping effect is estimated. The test results of the prototype are in accordance with the simulation results of the designed model. The resolution of the magnetometer can reach 30 nT. The test results indicate its sensitivity of more than 400 mV/μT when operating in a 10 Pa vacuum environment.
Highlights
Magnetometers are sensors for magnetic field detection, which are often employed in industrial, oceanographic and biomedical fields
A novel MEMS torsional resonant magnetometer based on the Lorentz Force principle is put forward
When the frequency f of the current is equal to the resonant frequency of the silicon resonator, the vibration amplitude will dramatically increase due to the resonance and the high quality factor of the structure
Summary
Magnetometers are sensors for magnetic field detection, which are often employed in industrial, oceanographic and biomedical fields. Hall Effect magnetometers have low sensitivity and large temperature shifts; the sensors based on magnetoresistance are only appropriate to measure intense magnetic fields and fluxgate effect magnetometers are very difficult to fabricate. A novel MEMS torsional resonant magnetometer based on the Lorentz Force principle is put forward. Such a sensor does not require magnetic materials, which makes it easier to fabricate by MEMS process. The new structures such as low-resistivity silicon resonator and multi-turn excitation coil are put forward, by which the sensor’s performance is greatly improved
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