Deposition and properties of MoS 2 thin films grown by pulsed laser evaporation

Abstract

Thin films of MoS 2 have been grown on stainless steel substrates by pulsed laser evaporation. Analysis by X-ray photoelectron spectroscopy indicates that films grown at substrate temperatures up to 300 °C have the same stoichiometry as bulk MoS 2; films grown at 450 °C are sulfur rich. The laser-deposited films have a granular structure and exhibit none of the dendritic structures typically observed in sputter-deposited films. Analysis of the films by X-ray diffraction indicates some preferred orientation. The coefficients of friction were measured in laboratory air and ranged from 0.09 to 0.25; the majority of values were between 0.16 and 0.20. These friction coefficients are in the appropriate range for a solid lubricant and indicate that pulsed laser evaporation is clearly a feasible technique for growing lubricious MoS 2 films.