Abstract
New superhard TiAlSiN films, characterized by a nanocomposite comprising nano-sized (Ti,Al,Si)N crystallites embedded in amorphous Si 3N 4 matrix, could be successfully synthesized on WCCo substrates by a hybrid coating system of arc ion plating (AIP) and sputtering method. The hardness and Young's modulus value of the TiAlSiN film increased with incorporation of Si, and had the maximum value of ∼55 GPa and ∼650 GPa at the Si content of 9 at.%, respectively. The average friction coefficient of the TiAlSiN films largely decreased with an increase of the Si content. This behavior would be attributed to the tribo-chemical reaction between Si and ambient humidity, which enabled to form SiO 2 or Si(OH) 2 tribo-layer playing a role as self-lubricant. The harder TiAlSiN film was found to be more wear-resistant against steel. A systematic work on the microstructure and mechanical properties of TiAlSiN films is reported in this paper.
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