Abstract
The relatively high-mobility metal-oxide thin-film transistors (TFTs) have the potential to realize radio-frequency (RF) circuits operating in the megahertz regime. Here, we investigate the RF performance of amorphous indium gallium zinc oxide (a-IGZO) TFTs on the glass substrate with the sputtered channel layer. The device exhibits a high current density of 22.6mA/mm by employing thin bi-layer Al2O3/SiO2 gate dielectrics. The 1.5μm gate length device achieves a current gain cutoff frequency fT of 384MHz and a maximum frequency of oscillation fmax of 1.06GHz. The record high RF response among the amorphous oxide channels makes it possible to explore new large-area electronics applications, such as low-cost radio frequency identification (RFID) tags. Furthermore, the corresponding small signal parameters were extracted and the voltage dependences of RF response were studied.
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