Abstract
An optical fiber sensor (OFS) demodulation system based on Micro-Electro-Mechanical System (MEMS) tunable filter (MTF) has been proposed and demonstrated in this study. By scanning the MTF, the acquired OFS curves were considered as the convolution of the tunable filter function and the real OFS spectrum. However, the wavelength setting error of the MTF significantly limited the measurement accuracy of the proposed demodulation system. To solve the problem, dual etalons with complementary phase shifts were adopted to calibrate the MTF in real time. For demonstration, a fiber Bragg grating and an open cavity Fabry-Pérot sensor were successfully demodulated by the MTF. Experimental results indicated that the measurement error of the MTF demodulator was improved from ±31 pm to ±3 pm, with the sensing resolution of 0.1 °C and 0.01 MPa, better than traditional grating-based spectrometers..
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