Abstract

Thick target PIXE (TTPIXE) data analysis requires the calculation of an integral (which we call penetration integral) which accounts for the various effects that take place during proton stopping in the target and lead to X-ray emission. This is done by numerical integration and in most TTPIXE work target homogeneity both along the surface and in depth is necessary. This reduces the applicability of the technique in cases as ion implanted, film coated, or other kinds of samples which are by their own nature nonhomogeneous in depth while preserving their surface homogeneity (we call them layered targets). The DATTPIXE main program, which enables the conversion of spectra peak area data into sample concentration values, is being developed so as to be able to face these kinds of problems. Secondary X-ray fluorescence is accounted for and the correction is calculated for each of the layers into which the target is divided for numerical integration. The program was tested by applying it to the analysis of three metal alloy certified reference materials from the British Chemical Standards. The need for secondary X-ray fluorescence corrections and the correctness of the method used are shown.

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