Abstract
We have demonstrated that gas pressure (pG) is a key parameter for fabricating stoichiometric LiNbO3 thin films during laser ablation. To theoretically describe the influence of pG, a cylindroid rigid-wall model was presented. It was shown that there exist two critical pressures related to Li and Nb: pLi and pNb(pLi<pNb). They separate pG into three intervals. When pG<pLi, pG has little influence on film stoichiometry and the obtained films contain fixed Li deficiency. When pLi⩽pG⩽pNb, pG plays an important role in forming stoichiometric films. When pG⩾pNb, the change of pG does not affect film stoichiometry, but the film growth because of greatly reduced energies of the species that reach the substrate. The presented theory was in good agreement with experiments. This model provides a useful way for growing multicomponent films by pulsed laser deposition.
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