Abstract
In adaptive optical (AO) systems, deformable mirrors are used to correct wavefront aberrations. In this study, we introduce various structural deformable mirrors used in low temperature environments: discrete actuators deformable mirror, bimorph deformable mirror, membrane deformable mirror and MEMS deformable mirror. And the basic working principle of these deformed mirrors is briefly described; the research results of low temperature deformable mirrors are presented in detail. According to formerly researches, we found out the two main factors influencing the performance of low temperature deformable mirrors. The advantages and disadvantages of various structural low temperature deformable mirrors are analyzed. Finally, the development trend of low temperature deformable mirrors is prospected.
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