Abstract
We demonstrate a cup-shaped yttria-doped barium zirconate (BYZ) membrane array fuel cell fabricated by silicon micromachining processes. The surface area of the BYZ membrane was increased by making the nano thin film BYZ from flat membrane to a three-dimensional membrane. A BYZ thin film electrolyte with a thickness of 300nm was deposited on pre-patterned silicon substrate with cup-shaped trenches. The fuel cell voltage-current curve was measured at 400°C to verify the functionality of the geometric increase of electricity from the three-dimensional membrane electrolyte.
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