Abstract
The effect of the surface-pretreatment of cyclo-olefin polymer (COP) substrates with vacuum-ultraviolet (VUV) light irradiation on the crystal growth of ZnO thin films deposited by room-temperature pulsed laser deposition (PLD) was investigated for development of flexible optical devices. 172-nm-excimer light irradiation with durations of 60 to 600 s in air was found to make the COP surface more hydrophilic and smooth. It was verified from measurements of X-ray diffraction, atomic force microscope and high-resolution transmission electron microscope that the ZnO thin films grown on the VUV-light-pretreated COP substrates exhibited enhanced (0001) orientation growth and increased crystallinity compared with the samples grown on substrates not subject to the pretreatment; the samples on the pretreated substrates also showed a smooth surface and atomically sharp interface between the thin film and the substrate. The electrical resistivity of the ZnO thin film grown on the VUV-light-pretreated COP substrate was estimated to be 2.3 × 10−3 Ωcm, which was 40% lower than that of the film grown on the untreated substrate.
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