Abstract
Crystalline thin films of lead sulfate, Pb1+ySO4+z(y=0 or 1, 0≤z≤1) could be prepared by an electron beam method with using a source of PbSO4+xPbO (0≤x≤1), under the following conditions: substrate temperature; 300°C, acceleration voltage; 20 kV and emission current; 58 mA. The sulfate films formed were composed of PbSO4 or Pb2SO5, and their compositions of the films changed with changing source composition. Either single phase of PbSO4 (y=0, z=0), or Pb2SO5, (y=1, z=1), or a mixture of these phases was formed with the source composition of x=0, x=1, or approximately x=0.5, respectively. Evaluation of the humidity sensitivity for these films revealed that crystalline thin films of PbSO4 and Pb2SO5 had the hydrophobic and hydrophilic properties, respectively, being one of the most promising humidity sensors because of quick response.
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