Abstract
The growth of titanium nitride crystals from the TiCl 4-H 2-N 2 system was studied using a flow method. The depositions were done on graphite plates heated externally. Red-brown coatings were formed on the lower temperature zone of the substrate and golden-yellow coatings were formed on the higher temperature zone. Needle crystals grew in the region of the substrate whose temperature was at 1200 °C to 1300 °C; they had diameters of 5–140 μm. The growth rate of needle crystals showed maxima against titanium tetrachloride and nitrogen concentrations. The growth rate was approximately proportional to P H2 1 2 . The maximum growth rate observed was ∼ 3 x 10 -5 cm/sec. The titanium nitride crystals were found to grow preferentially in the direction of [111].
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